P02700 - SEMI P27 - Parameter Checklist for Resist Thickness Measurement on a Substrate StdPbc-0220 The purpose of this standard

The purpose of this standard is twofold: to enable applications software to be developed that can assume the existence of standard concepts

This Guide can be used as a guide by semiconductor manufacturers and cleanroom facilities designers during the design of their facilities

本スタンダードは，Gases Global Technical Committeeで技術的に承認されている。現版は2011年12月24日，global Audits and Reviews Subcommitteeにて発行が承認された。2012年4月にwww

SEMI PV64-0714 (Reapproved 0121)

SEMI C38 — Guide for Phosphorus Oxychloride

P02700 - SEMI P27 - Parameter Checklist for Resist Thickness Measurement on a Substrate StdPbc-0220 The purpose of this standardThis checklist was technically approved by the Global Micropatterning Committee and is the direct responsibility of the Japanese Micropatterning Committee. Current edition approved by the Japanese Regional Standards Committee on April 28, 2003. Initially available at www. semi. org June 2003; to be published July 2003. Originally published in 1996. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain