TEL Tokyo Electron 51161-802-001 Interface Block Robot IRAM Lithius w/300mm Fork Range: 200 SCCM

Range: 200 SCCM

Part No: CQM1-OC222

Part No: 080627

Removed from a Karl Suss MJB 55 Wafer Mask Aligner System This Karl Suss 455-01 PCB Card is used working surplus

Part No: 02-140301-02 Model No:

TEL Tokyo Electron 51161-802-001 Interface Block Robot IRAM Lithius w/300mm Fork Range: 200 SCCMTEL Tokyo Electron 51161 802 001 Interface Block Robot IRAM Lithius w 300mm Fork Part No: 51161 802 001 Model No: Interface Block Robotic Arm Main IRAM Removed from a TEL Tokyo Electron Clean Track Lithius System Made in Japan Installed Components NSK Robot Servo Motor Part No: M SSB020FN502 NSK Linear Stage Slide Part No: XY HRS025ZRS202 Parts List Assembly Part No: 5087 403668 12, IRAM (LITHIUS IPL), X AXIS 5080 192746 11: BASE,FORK IRAM XY P5179