G08600 - SEMI G86 - Test Method for Measurement of Chip (Die) Strength by Mean of 3-Point Bending Revision:SEMI G86-0217 - Superseded This Test Method is also
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Description
This Test Method is also applicable to other types of packages
The GEM Standard defines which SECS-II messages should be used
SEMI E169-0615 (technical revision)
in order to control particulate contamination from those gases
EQIPs may be defined for a new equipment type not previously addressed in this Standard
G08600 - SEMI G86 - Test Method for Measurement of Chip (Die) Strength by Mean of 3-Point Bending Revision:SEMI G86-0217 - Superseded This Test Method is alsoThis Test Method defines a procedure for the evaluation of die strength by the mean of 3 point bending method. This Test Method applies only for 3 point bending method, and other methods will be defined by the separate documents. This Test Method is used to measure die strength for dies from processed wafers. Wafer thinning technology becomes popular to meet the demand for thin packages, so the die strength data is critical for the die quality and
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