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E01600 - SEMI E16 - マスフローコントローラ漏洩率の決定および記述のガイド StdVol-Automation Technology to be published February 1999
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Description
to be published February 1999
本标准规定了铝浆的共同特性,包括但不限于外观、颗粒度、固含量和粘度,烧结后的铝浆要求,包括但不限于附着力试验、弯曲度试验和水煮试验。
By this Standard
org in February 2010
The surface characterization tests to be performed are specified herein
E01600 - SEMI E16 - マスフローコントローラ漏洩率の決定および記述のガイド StdVol-Automation Technology to be published February 1999global Gases Committee2011513global Audits and Reviews Subcommittee20116www. semiviews. org www. semi. org1990200411 (MFCs) Referenced SEMI Standards None.
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